TIME-RESOLVED ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE

M.B. Hopkins, C.A. Anderson, Bill Graham

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)141-145
Number of pages5
JournalEurophysics Letters (EPL)
Volume8
Publication statusPublished - 1989

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