TIME-RESOLVED PLASMA PARAMETER MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE

C.A. Anderson, Bill Graham, M.B. Hopkins

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)783-785
Number of pages3
JournalApplied Physics Letters
Volume52
Publication statusPublished - 1988

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