TIME-RESOLVED PLASMA PARAMETER MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE

C.A. Anderson, Bill Graham, M.B. Hopkins

Research output: Contribution to journal › Article › peer-review

Cite this

@article{21f311eb75234b4fb1e3933770aff005,

title = "TIME-RESOLVED PLASMA PARAMETER MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE",

author = "C.A. Anderson and Bill Graham and M.B. Hopkins",

year = "1988",

language = "English",

volume = "52",

pages = "783--785",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}