| Original language | English |
|---|---|
| Pages (from-to) | 783-785 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 52 |
| Publication status | Published - 1988 |
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TIME-RESOLVED PLASMA PARAMETER MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE
- C.A. Anderson
- , Bill Graham
- , M.B. Hopkins
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