Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction

L. Puggini; J. Doyle; Seán McLoone

doi:10.1049/cp.2014.0722

Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction

L. Puggini, J. Doyle, Seán McLoone

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Semiconductor manufactures are increasing reliant on optical emission spectroscopy (OES) to source information on plasma characteristics and process change. However, nonlinearities in the response of OES sensors and errors in their calibration lead to discrepancies in observed wavelength detector response. This paper presents a technique for the retrospective spectral calibration of multiple OES sensors. Underlying methodology is given, and alignment performance is evaluated using OES recordings from a semiconductor plasma process. The paper concludes with a discussion of results and suggests avenues for future work.

Original language	English
Title of host publication	Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET
Publisher	IET
Pages	402-407
DOIs	https://doi.org/10.1049/cp.2014.0722
Publication status	Published - Jun 2014
Event	25th Irish Signals and Systems Conference - Limerick, Ireland Duration: 26 May 2013 → 27 Jun 2014

Conference

Conference	25th Irish Signals and Systems Conference
Country/Territory	Ireland
City	Limerick
Period	26/05/2013 → 27/06/2014

Bibliographical note

Awarded best student paper prize

Access to Document

10.1049/cp.2014.0722

Cite this

Puggini, L., Doyle, J., & McLoone, S. (2014). Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction. In Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET (pp. 402-407). IET. https://doi.org/10.1049/cp.2014.0722

@inproceedings{bcb3bfbfb34d4ffbbb108dfadbb5b9e9,

title = "Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction",

abstract = "Semiconductor manufactures are increasing reliant on optical emission spectroscopy (OES) to source information on plasma characteristics and process change. However, nonlinearities in the response of OES sensors and errors in their calibration lead to discrepancies in observed wavelength detector response. This paper presents a technique for the retrospective spectral calibration of multiple OES sensors. Underlying methodology is given, and alignment performance is evaluated using OES recordings from a semiconductor plasma process. The paper concludes with a discussion of results and suggests avenues for future work.",

author = "L. Puggini and J. Doyle and Se{\'a}n McLoone",

note = "Awarded best student paper prize; 25th Irish Signals and Systems Conference ; Conference date: 26-05-2013 Through 27-06-2014",

year = "2014",

month = jun,

doi = "10.1049/cp.2014.0722",

language = "English",

pages = "402--407",

booktitle = "Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET",

publisher = "IET",

}

Puggini, L, Doyle, J & McLoone, S 2014, Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction. in Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET. IET, pp. 402-407, 25th Irish Signals and Systems Conference, Limerick, Ireland, 26/05/2013. https://doi.org/10.1049/cp.2014.0722

Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction. / Puggini, L.; Doyle, J.; McLoone, Seán.

Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET. IET, 2014. p. 402-407.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction

AU - Puggini, L.

AU - Doyle, J.

AU - McLoone, Seán

N1 - Awarded best student paper prize

PY - 2014/6

Y1 - 2014/6

N2 - Semiconductor manufactures are increasing reliant on optical emission spectroscopy (OES) to source information on plasma characteristics and process change. However, nonlinearities in the response of OES sensors and errors in their calibration lead to discrepancies in observed wavelength detector response. This paper presents a technique for the retrospective spectral calibration of multiple OES sensors. Underlying methodology is given, and alignment performance is evaluated using OES recordings from a semiconductor plasma process. The paper concludes with a discussion of results and suggests avenues for future work.

AB - Semiconductor manufactures are increasing reliant on optical emission spectroscopy (OES) to source information on plasma characteristics and process change. However, nonlinearities in the response of OES sensors and errors in their calibration lead to discrepancies in observed wavelength detector response. This paper presents a technique for the retrospective spectral calibration of multiple OES sensors. Underlying methodology is given, and alignment performance is evaluated using OES recordings from a semiconductor plasma process. The paper concludes with a discussion of results and suggests avenues for future work.

U2 - 10.1049/cp.2014.0722

DO - 10.1049/cp.2014.0722

M3 - Conference contribution

SP - 402

EP - 407

BT - Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET

PB - IET

T2 - 25th Irish Signals and Systems Conference

Y2 - 26 May 2013 through 27 June 2014

ER -

Puggini L, Doyle J, McLoone S. Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction. In Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET. IET. 2014. p. 402-407 https://doi.org/10.1049/cp.2014.0722

Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction

Abstract

Conference

Bibliographical note

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Cite this