Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction

L. Puggini, J. Doyle, Seán McLoone

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Semiconductor manufactures are increasing reliant on optical emission spectroscopy (OES) to source information on plasma characteristics and process change. However, nonlinearities in the response of OES sensors and errors in their calibration lead to discrepancies in observed wavelength detector response. This paper presents a technique for the retrospective spectral calibration of multiple OES sensors. Underlying methodology is given, and alignment performance is evaluated using OES recordings from a semiconductor plasma process. The paper concludes with a discussion of results and suggests avenues for future work.
Original languageEnglish
Title of host publicationProceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET
PublisherIET
Pages402-407
DOIs
Publication statusPublished - Jun 2014
Event25th Irish Signals and Systems Conference - Limerick, Ireland
Duration: 26 May 201327 Jun 2014

Conference

Conference25th Irish Signals and Systems Conference
CountryIreland
CityLimerick
Period26/05/201327/06/2014

Bibliographical note

Awarded best student paper prize

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  • Cite this

    Puggini, L., Doyle, J., & McLoone, S. (2014). Towards Multi-Sensor Spectral Alignment Through Post Measurement Calibration Correction. In Proceedings of the Joint 25th IET Irish Signals & Systems Conference 2014& 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014). 25th IET (pp. 402-407). IET. https://doi.org/10.1049/cp.2014.0722