Tracking plasma etch process variations using Principal Component Analysis of OES data

B. Ma, Seán McLoone, J. Ringwood

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)
Original languageEnglish
Publication statusPublished - 2007
EventInternational Conference on Informatics in Control, Automation and Robotics (ICINCO 2007) - Angers, France
Duration: 09 May 200712 May 2007

Conference

ConferenceInternational Conference on Informatics in Control, Automation and Robotics (ICINCO 2007)
CountryFrance
CityAngers
Period09/05/200712/05/2007

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