Transfer of Stacked SiO2/Poly Si Membrane For Microchannels

Hao Zhou, Paul Rainey, Neil Mitchell, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages43-46
Number of pages4
Publication statusPublished - Oct 2002
EventMicromechanics Europe Workshop MME 2002 - Sinaia, Romania
Duration: 01 Oct 200201 Oct 2002

Conference

ConferenceMicromechanics Europe Workshop MME 2002
CountryRomania
CitySinaia
Period01/10/200201/10/2002

Cite this

Zhou, H., Rainey, P., Mitchell, N., & Gamble, H. (2002). Transfer of Stacked SiO2/Poly Si Membrane For Microchannels. 43-46. Paper presented at Micromechanics Europe Workshop MME 2002, Sinaia, Romania.