Changes of the electron dynamics during the mode transition (E- to H-mode) in a hydrogen radio-frequency (rf) inductively coupled plasma are investigated using space and phase resolved optical emission spectroscopy. The E- mode is characterized through relatively weak optical emission which is strongly modulated on a nanosecond time scale during the rf-cycle, with one pronounced maximum per cycle. The modulation in H-mode, with twice the rf-frequency, is significantly weaker while the emission intensities are about two orders of magnitude higher. In particular the transition between these two modes is studied under variations of rf-power input and gas pressure. Characteristic spatio-temporal structures are observed and can be understood in the frame of a simple model combining both coupling mechanisms in the transition regime.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Abdel-Rahman, M., Schulz-von Der Gathen, V., & Gans, T. (2007). Transition phenomena in a radio-frequency inductively coupled plasma. Journal of Physics D: Applied Physics, 40 (6)(6), 1678-1683. . https://doi.org/10.1088/0022-3727/40/6/017