Transition phenomena in a radio-frequency inductively coupled plasma

M. Abdel-Rahman, V. Schulz-von Der Gathen, Timo Gans

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

Changes of the electron dynamics during the mode transition (E- to H-mode) in a hydrogen radio-frequency (rf) inductively coupled plasma are investigated using space and phase resolved optical emission spectroscopy. The E- mode is characterized through relatively weak optical emission which is strongly modulated on a nanosecond time scale during the rf-cycle, with one pronounced maximum per cycle. The modulation in H-mode, with twice the rf-frequency, is significantly weaker while the emission intensities are about two orders of magnitude higher. In particular the transition between these two modes is studied under variations of rf-power input and gas pressure. Characteristic spatio-temporal structures are observed and can be understood in the frame of a simple model combining both coupling mechanisms in the transition regime.
Original languageEnglish
Article number017
Pages (from-to)1678-1683
Number of pages6
JournalJournal of Physics D: Applied Physics
Volume40 (6)
Issue number6
DOIs
Publication statusPublished - 21 Mar 2007

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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