Ultrasmall radio frequency driven microhollow cathode discharge

C. M. O. Mahony; T. Gans; W. G. Graham; P. D. Maguire; Z. Lj. Petrović

doi:10.1063/1.2956412

Ultrasmall radio frequency driven microhollow cathode discharge

C. M. O. Mahony, T. Gans, W. G. Graham, P. D. Maguire, Z. Lj. Petrović

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Abstract

We have operated 25-100 mu m diameter radio frequency microhollow cathode discharges stably, for many hours, in neon and in argon. Electrical and spectroscopic measurements were used to explore three possible electron heating modes and obtain detail regarding the electron energy distribution. Analysis points to the possibility of pendular electron heating at low voltages.

Original language	English
Article number	011501
Number of pages	3
Journal	Applied Physics Letters
Volume	93
Issue number	1
DOIs	https://doi.org/10.1063/1.2956412
Publication status	Published - 07 Jul 2008

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2956412

Ultrasmall radio frequency driven microhollow cathode discharge
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Ultrasmall radio frequency driven microhollow cathode discharge

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