Use of a random phase plate as a KrF laser beam homogenizer for thin film deposition applications

Ciaran Lewis, I. Weaver, L.A. Doyle, G.W. Martin, Thomas Morrow, D.A. Pepler, C.N. Danson, I.N. Ross

Research output: Contribution to journalArticle

19 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy