Virtual Metrology for Plasma Etching

S. Lynn, John Ringwood, N. MacGearailt, Emanuele Ragnoli, Seán McLoone

Research output: Contribution to conference › Poster

Original language	English
Pages	49
Publication status	Published - 2008
Event	Intel European Research and Innovation Conference - Leixlip, Ireland Duration: 10 Sept 2008 → 12 Sept 2008

Conference	Intel European Research and Innovation Conference
Country/Territory	Ireland
City	Leixlip
Period	10/09/2008 → 12/09/2008

Cite this

@conference{77c59eeab94549868c10ddb21a61220a,

title = "Virtual Metrology for Plasma Etching",

author = "S. Lynn and John Ringwood and N. MacGearailt and Emanuele Ragnoli and Se{\'a}n McLoone",

year = "2008",

language = "English",

pages = "49",

note = "Intel European Research and Innovation Conference ; Conference date: 10-09-2008 Through 12-09-2008",

}