Virtual Metrology for Plasma Etching

S. Lynn, John Ringwood, N. MacGearailt, Emanuele Ragnoli, Seán McLoone

Research output: Contribution to conferencePoster

Original languageEnglish
Pages49
Publication statusPublished - 2008
EventIntel European Research and Innovation Conference - Leixlip, Ireland
Duration: 10 Sep 200812 Sep 2008

Conference

ConferenceIntel European Research and Innovation Conference
CountryIreland
CityLeixlip
Period10/09/200812/09/2008

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