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    Chemical Compounds

    100
    Germanium
    Concept: Germanium
    Weight: 100%
    Domain: Chemical Compounds
    69
    Hafnium
    Concept: Hafnium
    Weight: 69%
    Domain: Chemical Compounds
    56
    MOS capacitors
    Concept: MOS capacitors
    Weight: 56%
    Domain: Chemical Compounds
    52
    Silicon
    Concept: Silicon
    Weight: 52%
    Domain: Chemical Compounds
    29
    Oxides
    Concept: Oxides
    Weight: 29%
    Domain: Chemical Compounds
    28
    Silicon Dioxide
    Concept: Silicon Dioxide
    Weight: 28%
    Domain: Chemical Compounds
    26
    Substrates
    Concept: Substrates
    Weight: 26%
    Domain: Chemical Compounds
    23
    Thermodynamic stabi...
    Concept: Thermodynamic stability
    Weight: 23%
    Domain: Chemical Compounds
    22
    Aluminum Oxide
    Concept: Aluminum Oxide
    Weight: 22%
    Domain: Chemical Compounds
    21
    Sulfur
    Concept: Sulfur
    Weight: 21%
    Domain: Chemical Compounds
    21
    Photoemission
    Concept: Photoemission
    Weight: 21%
    Domain: Chemical Compounds
    19
    Synchrotron radiati...
    Concept: Synchrotron radiation
    Weight: 19%
    Domain: Chemical Compounds
    19
    Nitrogen plasma
    Concept: Nitrogen plasma
    Weight: 19%
    Domain: Chemical Compounds
    17
    Silanes
    Concept: Silanes
    Weight: 17%
    Domain: Chemical Compounds
    16
    Steam
    Concept: Steam
    Weight: 16%
    Domain: Chemical Compounds
    15
    Plasma enhanced che...
    Concept: Plasma enhanced chemical vapor deposition
    Weight: 15%
    Domain: Chemical Compounds
    14
    Aluminum
    Concept: Aluminum
    Weight: 14%
    Domain: Chemical Compounds
    13
    Oxide films
    Concept: Oxide films
    Weight: 13%
    Domain: Chemical Compounds
    12
    Monolayers
    Concept: Monolayers
    Weight: 12%
    Domain: Chemical Compounds
    11
    Temperature
    Concept: Temperature
    Weight: 11%
    Domain: Chemical Compounds

    Physics & Astronomy

    84
    atomic layer epitax...
    Concept: atomic layer epitaxy
    Weight: 84%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    65
    hafnium oxides
    Concept: hafnium oxides
    Weight: 65%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    61
    germanium
    Concept: germanium
    Weight: 61%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    50
    hafnium
    Concept: hafnium
    Weight: 50%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    36
    capacitors
    Concept: capacitors
    Weight: 36%
    Domain: Physics & Astronomy
    Semantic group: General
    29
    dioxides
    Concept: dioxides
    Weight: 29%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    25
    silicon
    Concept: silicon
    Weight: 25%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    20
    silicon dioxide
    Concept: silicon dioxide
    Weight: 20%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    17
    nitrogen plasma
    Concept: nitrogen plasma
    Weight: 17%
    Domain: Physics & Astronomy
    Semantic group: Physics
    15
    schedules
    Concept: schedules
    Weight: 15%
    Domain: Physics & Astronomy
    Semantic group: General
    13
    oxides
    Concept: oxides
    Weight: 13%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    13
    aluminum oxides
    Concept: aluminum oxides
    Weight: 13%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    12
    oxide films
    Concept: oxide films
    Weight: 12%
    Domain: Physics & Astronomy
    Semantic group: General
    12
    water vapor
    Concept: water vapor
    Weight: 12%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    11
    thermal stability
    Concept: thermal stability
    Weight: 11%
    Domain: Physics & Astronomy
    Semantic group: General
    11
    sulfur
    Concept: sulfur
    Weight: 11%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    10
    permittivity
    Concept: permittivity
    Weight: 10%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    9
    aluminum
    Concept: aluminum
    Weight: 9%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    9
    threshold voltage
    Concept: threshold voltage
    Weight: 9%
    Domain: Physics & Astronomy
    Semantic group: Physics
    9
    silanes
    Concept: silanes
    Weight: 9%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials

    Engineering

    General

    Chemistry and Materials

    Physics

    Engineering & Materials Science

    72
    Germanium
    Concept: Germanium
    Weight: 72%
    Domain: Engineering & Materials Science
    72
    Hafnium oxides
    Concept: Hafnium oxides
    Weight: 72%
    Domain: Engineering & Materials Science
    56
    MOS capacitors
    Concept: MOS capacitors
    Weight: 56%
    Domain: Engineering & Materials Science
    53
    Hafnium
    Concept: Hafnium
    Weight: 53%
    Domain: Engineering & Materials Science
    30
    Silicon
    Concept: Silicon
    Weight: 30%
    Domain: Engineering & Materials Science
    26
    Substrates
    Concept: Substrates
    Weight: 26%
    Domain: Engineering & Materials Science
    24
    Oxides
    Concept: Oxides
    Weight: 24%
    Domain: Engineering & Materials Science
    23
    Thermodynamic stabi...
    Concept: Thermodynamic stability
    Weight: 23%
    Domain: Engineering & Materials Science
    21
    Silica
    Concept: Silica
    Weight: 21%
    Domain: Engineering & Materials Science
    21
    Photoemission
    Concept: Photoemission
    Weight: 21%
    Domain: Engineering & Materials Science
    19
    Synchrotron radiati...
    Concept: Synchrotron radiation
    Weight: 19%
    Domain: Engineering & Materials Science
    19
    Nitrogen plasma
    Concept: Nitrogen plasma
    Weight: 19%
    Domain: Engineering & Materials Science
    17
    Sulfur
    Concept: Sulfur
    Weight: 17%
    Domain: Engineering & Materials Science
    15
    Aluminum
    Concept: Aluminum
    Weight: 15%
    Domain: Engineering & Materials Science
    15
    Plasma enhanced che...
    Concept: Plasma enhanced chemical vapor deposition
    Weight: 15%
    Domain: Engineering & Materials Science
    13
    Water vapor
    Concept: Water vapor
    Weight: 13%
    Domain: Engineering & Materials Science
    13
    Silanes
    Concept: Silanes
    Weight: 13%
    Domain: Engineering & Materials Science
    13
    Oxide films
    Concept: Oxide films
    Weight: 13%
    Domain: Engineering & Materials Science
    12
    Monolayers
    Concept: Monolayers
    Weight: 12%
    Domain: Engineering & Materials Science
    11
    Temperature
    Concept: Temperature
    Weight: 11%
    Domain: Engineering & Materials Science