Refine and narrow down result by adding related concepts

    Engineering & Materials Science

    100
    Germanium
    Concept: Germanium
    Weight: 100%
    Domain: Engineering & Materials Science
    78
    MOS capacitors
    Concept: MOS capacitors
    Weight: 78%
    Domain: Engineering & Materials Science
    61
    Capacitors
    Concept: Capacitors
    Weight: 61%
    Domain: Engineering & Materials Science
    49
    Hafnium
    Concept: Hafnium
    Weight: 49%
    Domain: Engineering & Materials Science
    38
    Degradation
    Concept: Degradation
    Weight: 38%
    Domain: Engineering & Materials Science
    33
    Nitridation
    Concept: Nitridation
    Weight: 33%
    Domain: Engineering & Materials Science
    32
    Thermodynamic stabi...
    Concept: Thermodynamic stability
    Weight: 32%
    Domain: Engineering & Materials Science
    30
    Silica
    Concept: Silica
    Weight: 30%
    Domain: Engineering & Materials Science
    29
    Photoemission
    Concept: Photoemission
    Weight: 29%
    Domain: Engineering & Materials Science
    27
    Synchrotron radiati...
    Concept: Synchrotron radiation
    Weight: 27%
    Domain: Engineering & Materials Science
    24
    Metals
    Concept: Metals
    Weight: 24%
    Domain: Engineering & Materials Science
    23
    Sulfur
    Concept: Sulfur
    Weight: 23%
    Domain: Engineering & Materials Science
    22
    Temperature
    Concept: Temperature
    Weight: 22%
    Domain: Engineering & Materials Science
    20
    Densification
    Concept: Densification
    Weight: 20%
    Domain: Engineering & Materials Science
    19
    Leakage currents
    Concept: Leakage currents
    Weight: 19%
    Domain: Engineering & Materials Science
    18
    Plasmas
    Concept: Plasmas
    Weight: 18%
    Domain: Engineering & Materials Science
    18
    Silanes
    Concept: Silanes
    Weight: 18%
    Domain: Engineering & Materials Science
    17
    Hysteresis
    Concept: Hysteresis
    Weight: 17%
    Domain: Engineering & Materials Science
    16
    Current density
    Concept: Current density
    Weight: 16%
    Domain: Engineering & Materials Science
    16
    Threshold voltage
    Concept: Threshold voltage
    Weight: 16%
    Domain: Engineering & Materials Science

    Chemical Compounds

    79
    Atomic layer deposi...
    Concept: Atomic layer deposition
    Weight: 79%
    Domain: Chemical Compounds
    64
    Hafnium
    Concept: Hafnium
    Weight: 64%
    Domain: Chemical Compounds
    55
    Germanium
    Concept: Germanium
    Weight: 55%
    Domain: Chemical Compounds
    52
    MOS capacitors
    Concept: MOS capacitors
    Weight: 52%
    Domain: Chemical Compounds
    40
    Oxides
    Concept: Oxides
    Weight: 40%
    Domain: Chemical Compounds
    38
    Silicon Dioxide
    Concept: Silicon Dioxide
    Weight: 38%
    Domain: Chemical Compounds
    32
    Thermodynamic stabi...
    Concept: Thermodynamic stability
    Weight: 32%
    Domain: Chemical Compounds
    31
    Aluminum Oxide
    Concept: Aluminum Oxide
    Weight: 31%
    Domain: Chemical Compounds
    29
    Sulfur
    Concept: Sulfur
    Weight: 29%
    Domain: Chemical Compounds
    29
    Photoemission
    Concept: Photoemission
    Weight: 29%
    Domain: Chemical Compounds
    27
    Synchrotron radiati...
    Concept: Synchrotron radiation
    Weight: 27%
    Domain: Chemical Compounds
    24
    Silanes
    Concept: Silanes
    Weight: 24%
    Domain: Chemical Compounds
    16
    Temperature
    Concept: Temperature
    Weight: 16%
    Domain: Chemical Compounds
    16
    Threshold voltage
    Concept: Threshold voltage
    Weight: 16%
    Domain: Chemical Compounds
    14
    Indium
    Concept: Indium
    Weight: 14%
    Domain: Chemical Compounds
    14
    Core levels
    Concept: Core levels
    Weight: 14%
    Domain: Chemical Compounds
    12
    Capacitors
    Concept: Capacitors
    Weight: 12%
    Domain: Chemical Compounds
    12
    Capacitance
    Concept: Capacitance
    Weight: 12%
    Domain: Chemical Compounds
    10
    Film thickness
    Concept: Film thickness
    Weight: 10%
    Domain: Chemical Compounds
    9
    MOS devices
    Concept: MOS devices
    Weight: 9%
    Domain: Chemical Compounds

    Physics & Astronomy

    54
    atomic layer epitax...
    Concept: atomic layer epitaxy
    Weight: 54%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    46
    hafnium
    Concept: hafnium
    Weight: 46%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    40
    dioxides
    Concept: dioxides
    Weight: 40%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    34
    germanium
    Concept: germanium
    Weight: 34%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    33
    capacitors
    Concept: capacitors
    Weight: 33%
    Domain: Physics & Astronomy
    Semantic group: General
    27
    silicon dioxide
    Concept: silicon dioxide
    Weight: 27%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    18
    oxides
    Concept: oxides
    Weight: 18%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    18
    aluminum oxides
    Concept: aluminum oxides
    Weight: 18%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    16
    thermal stability
    Concept: thermal stability
    Weight: 16%
    Domain: Physics & Astronomy
    Semantic group: General
    16
    sulfur
    Concept: sulfur
    Weight: 16%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    12
    threshold voltage
    Concept: threshold voltage
    Weight: 12%
    Domain: Physics & Astronomy
    Semantic group: Physics
    12
    silanes
    Concept: silanes
    Weight: 12%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    10
    capacitance
    Concept: capacitance
    Weight: 10%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    9
    hafnium oxides
    Concept: hafnium oxides
    Weight: 9%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    8
    wafers
    Concept: wafers
    Weight: 8%
    Domain: Physics & Astronomy
    Semantic group: General
    7
    film thickness
    Concept: film thickness
    Weight: 7%
    Domain: Physics & Astronomy
    Semantic group: General
    5
    indium
    Concept: indium
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    5
    stoichiometry
    Concept: stoichiometry
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: General
    5
    atmospheric pressur...
    Concept: atmospheric pressure
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Physics
    5
    synchrotron radiati...
    Concept: synchrotron radiation
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Physics

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    Chemistry and Materials

    Physics