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    Chemical Compounds

    100
    Germanium
    Concept: Germanium
    Weight: 100%
    Domain: Chemical Compounds
    46
    Aluminum Oxide
    Concept: Aluminum Oxide
    Weight: 46%
    Domain: Chemical Compounds
    31
    Hafnium
    Concept: Hafnium
    Weight: 31%
    Domain: Chemical Compounds
    29
    Atomic layer deposi...
    Concept: Atomic layer deposition
    Weight: 29%
    Domain: Chemical Compounds
    25
    MOS capacitors
    Concept: MOS capacitors
    Weight: 25%
    Domain: Chemical Compounds
    25
    Wafer bonding
    Concept: Wafer bonding
    Weight: 25%
    Domain: Chemical Compounds
    21
    Silicon
    Concept: Silicon
    Weight: 21%
    Domain: Chemical Compounds
    15
    Silicon Dioxide
    Concept: Silicon Dioxide
    Weight: 15%
    Domain: Chemical Compounds
    9
    Plasma enhanced che...
    Concept: Plasma enhanced chemical vapor deposition
    Weight: 9%
    Domain: Chemical Compounds
    8
    Nitrogen plasma
    Concept: Nitrogen plasma
    Weight: 8%
    Domain: Chemical Compounds
    8
    Annealing
    Concept: Annealing
    Weight: 8%
    Domain: Chemical Compounds
    7
    Steam
    Concept: Steam
    Weight: 7%
    Domain: Chemical Compounds
    6
    Aluminum
    Concept: Aluminum
    Weight: 6%
    Domain: Chemical Compounds
    6
    Oxide films
    Concept: Oxide films
    Weight: 6%
    Domain: Chemical Compounds
    5
    Monolayers
    Concept: Monolayers
    Weight: 5%
    Domain: Chemical Compounds
    5
    Permittivity
    Concept: Permittivity
    Weight: 5%
    Domain: Chemical Compounds
    5
    Threshold voltage
    Concept: Threshold voltage
    Weight: 5%
    Domain: Chemical Compounds
    4
    Capacitors
    Concept: Capacitors
    Weight: 4%
    Domain: Chemical Compounds
    4
    Capacitance
    Concept: Capacitance
    Weight: 4%
    Domain: Chemical Compounds
    4
    Electrodes
    Concept: Electrodes
    Weight: 4%
    Domain: Chemical Compounds

    Physics & Astronomy

    45
    germanium
    Concept: germanium
    Weight: 45%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    29
    hafnium oxides
    Concept: hafnium oxides
    Weight: 29%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    25
    atomic layer epitax...
    Concept: atomic layer epitaxy
    Weight: 25%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    22
    hafnium
    Concept: hafnium
    Weight: 22%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    16
    capacitors
    Concept: capacitors
    Weight: 16%
    Domain: Physics & Astronomy
    Semantic group: General
    16
    sapphire
    Concept: sapphire
    Weight: 16%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    15
    wafers
    Concept: wafers
    Weight: 15%
    Domain: Physics & Astronomy
    Semantic group: General
    13
    dioxides
    Concept: dioxides
    Weight: 13%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    10
    silicon dioxide
    Concept: silicon dioxide
    Weight: 10%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    10
    silicon
    Concept: silicon
    Weight: 10%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    7
    nitrogen plasma
    Concept: nitrogen plasma
    Weight: 7%
    Domain: Physics & Astronomy
    Semantic group: Physics
    7
    annealing
    Concept: annealing
    Weight: 7%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    6
    schedules
    Concept: schedules
    Weight: 6%
    Domain: Physics & Astronomy
    Semantic group: General
    5
    oxide films
    Concept: oxide films
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: General
    5
    water vapor
    Concept: water vapor
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    4
    permittivity
    Concept: permittivity
    Weight: 4%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    4
    aluminum
    Concept: aluminum
    Weight: 4%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    4
    threshold voltage
    Concept: threshold voltage
    Weight: 4%
    Domain: Physics & Astronomy
    Semantic group: Physics
    4
    cycles
    Concept: cycles
    Weight: 4%
    Domain: Physics & Astronomy
    Semantic group: Physics
    3
    electrodes
    Concept: electrodes
    Weight: 3%
    Domain: Physics & Astronomy
    Semantic group: Engineering

    Engineering

    General

    Chemistry and Materials

    Physics

    Engineering & Materials Science

    38
    Sapphire
    Concept: Sapphire
    Weight: 38%
    Domain: Engineering & Materials Science
    32
    Hafnium oxides
    Concept: Hafnium oxides
    Weight: 32%
    Domain: Engineering & Materials Science
    29
    Atomic layer deposi...
    Concept: Atomic layer deposition
    Weight: 29%
    Domain: Engineering & Materials Science
    25
    MOS capacitors
    Concept: MOS capacitors
    Weight: 25%
    Domain: Engineering & Materials Science
    25
    Wafer bonding
    Concept: Wafer bonding
    Weight: 25%
    Domain: Engineering & Materials Science
    24
    Hafnium
    Concept: Hafnium
    Weight: 24%
    Domain: Engineering & Materials Science
    12
    Silicon
    Concept: Silicon
    Weight: 12%
    Domain: Engineering & Materials Science
    11
    Silica
    Concept: Silica
    Weight: 11%
    Domain: Engineering & Materials Science
    9
    Plasma enhanced che...
    Concept: Plasma enhanced chemical vapor deposition
    Weight: 9%
    Domain: Engineering & Materials Science
    8
    Nitrogen plasma
    Concept: Nitrogen plasma
    Weight: 8%
    Domain: Engineering & Materials Science
    8
    Annealing
    Concept: Annealing
    Weight: 8%
    Domain: Engineering & Materials Science
    6
    Water vapor
    Concept: Water vapor
    Weight: 6%
    Domain: Engineering & Materials Science
    6
    Oxide films
    Concept: Oxide films
    Weight: 6%
    Domain: Engineering & Materials Science
    5
    Monolayers
    Concept: Monolayers
    Weight: 5%
    Domain: Engineering & Materials Science
    5
    Permittivity
    Concept: Permittivity
    Weight: 5%
    Domain: Engineering & Materials Science
    5
    Threshold voltage
    Concept: Threshold voltage
    Weight: 5%
    Domain: Engineering & Materials Science
    4
    Aluminum
    Concept: Aluminum
    Weight: 4%
    Domain: Engineering & Materials Science
    4
    Capacitors
    Concept: Capacitors
    Weight: 4%
    Domain: Engineering & Materials Science
    4
    Capacitance
    Concept: Capacitance
    Weight: 4%
    Domain: Engineering & Materials Science
    4
    Electrodes
    Concept: Electrodes
    Weight: 4%
    Domain: Engineering & Materials Science

    Selected concepts

    Engineering & Materials Science

    100
    Germanium
    100
    Substrates

    Chemical Compounds

    100
    Substrates

    3 experts found with research output relating to all selected concepts

    Research Output range