Refine and narrow down result by adding related concepts

    Engineering & Materials Science

    100
    Germanium
    Concept: Germanium
    Weight: 100%
    Domain: Engineering & Materials Science
    73
    Atomic layer deposi...
    Concept: Atomic layer deposition
    Weight: 73%
    Domain: Engineering & Materials Science
    48
    Nitridation
    Concept: Nitridation
    Weight: 48%
    Domain: Engineering & Materials Science
    45
    Hafnium oxides
    Concept: Hafnium oxides
    Weight: 45%
    Domain: Engineering & Materials Science
    35
    Capacitors
    Concept: Capacitors
    Weight: 35%
    Domain: Engineering & Materials Science
    33
    Hafnium
    Concept: Hafnium
    Weight: 33%
    Domain: Engineering & Materials Science
    31
    Substrates
    Concept: Substrates
    Weight: 31%
    Domain: Engineering & Materials Science
    29
    Silicon
    Concept: Silicon
    Weight: 29%
    Domain: Engineering & Materials Science
    24
    Nitrogen plasma
    Concept: Nitrogen plasma
    Weight: 24%
    Domain: Engineering & Materials Science
    23
    Degradation
    Concept: Degradation
    Weight: 23%
    Domain: Engineering & Materials Science
    22
    Electric properties
    Concept: Electric properties
    Weight: 22%
    Domain: Engineering & Materials Science
    15
    Metals
    Concept: Metals
    Weight: 15%
    Domain: Engineering & Materials Science
    14
    Plasmas
    Concept: Plasmas
    Weight: 14%
    Domain: Engineering & Materials Science
    13
    Silica
    Concept: Silica
    Weight: 13%
    Domain: Engineering & Materials Science
    11
    Atmospheric pressur...
    Concept: Atmospheric pressure
    Weight: 11%
    Domain: Engineering & Materials Science
    11
    Temperature
    Concept: Temperature
    Weight: 11%
    Domain: Engineering & Materials Science
    11
    Electrodes
    Concept: Electrodes
    Weight: 11%
    Domain: Engineering & Materials Science
    11
    Chemical vapor depo...
    Concept: Chemical vapor deposition
    Weight: 11%
    Domain: Engineering & Materials Science
    9
    Plasma enhanced che...
    Concept: Plasma enhanced chemical vapor deposition
    Weight: 9%
    Domain: Engineering & Materials Science
    9
    Densification
    Concept: Densification
    Weight: 9%
    Domain: Engineering & Materials Science

    Chemical Compounds

    62
    Germanium
    Concept: Germanium
    Weight: 62%
    Domain: Chemical Compounds
    49
    Silicon
    Concept: Silicon
    Weight: 49%
    Domain: Chemical Compounds
    47
    MOS capacitors
    Concept: MOS capacitors
    Weight: 47%
    Domain: Chemical Compounds
    43
    Hafnium
    Concept: Hafnium
    Weight: 43%
    Domain: Chemical Compounds
    40
    Atomic layer deposi...
    Concept: Atomic layer deposition
    Weight: 40%
    Domain: Chemical Compounds
    26
    Substrates
    Concept: Substrates
    Weight: 26%
    Domain: Chemical Compounds
    17
    Silicon Dioxide
    Concept: Silicon Dioxide
    Weight: 17%
    Domain: Chemical Compounds
    12
    Nitrogen plasma
    Concept: Nitrogen plasma
    Weight: 12%
    Domain: Chemical Compounds
    10
    Steam
    Concept: Steam
    Weight: 10%
    Domain: Chemical Compounds
    9
    Plasma enhanced che...
    Concept: Plasma enhanced chemical vapor deposition
    Weight: 9%
    Domain: Chemical Compounds
    9
    Aluminum
    Concept: Aluminum
    Weight: 9%
    Domain: Chemical Compounds
    8
    Oxide films
    Concept: Oxide films
    Weight: 8%
    Domain: Chemical Compounds
    7
    Monolayers
    Concept: Monolayers
    Weight: 7%
    Domain: Chemical Compounds
    7
    Permittivity
    Concept: Permittivity
    Weight: 7%
    Domain: Chemical Compounds
    7
    Threshold voltage
    Concept: Threshold voltage
    Weight: 7%
    Domain: Chemical Compounds
    6
    Annealing
    Concept: Annealing
    Weight: 6%
    Domain: Chemical Compounds
    5
    Capacitors
    Concept: Capacitors
    Weight: 5%
    Domain: Chemical Compounds
    5
    Degradation
    Concept: Degradation
    Weight: 5%
    Domain: Chemical Compounds
    5
    Capacitance
    Concept: Capacitance
    Weight: 5%
    Domain: Chemical Compounds
    5
    Electrodes
    Concept: Electrodes
    Weight: 5%
    Domain: Chemical Compounds

    Physics & Astronomy

    40
    hafnium oxides
    Concept: hafnium oxides
    Weight: 40%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    38
    germanium
    Concept: germanium
    Weight: 38%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    34
    atomic layer epitax...
    Concept: atomic layer epitaxy
    Weight: 34%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    31
    hafnium
    Concept: hafnium
    Weight: 31%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    22
    capacitors
    Concept: capacitors
    Weight: 22%
    Domain: Physics & Astronomy
    Semantic group: General
    18
    dioxides
    Concept: dioxides
    Weight: 18%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    14
    silicon
    Concept: silicon
    Weight: 14%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    12
    silicon dioxide
    Concept: silicon dioxide
    Weight: 12%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    10
    nitrogen plasma
    Concept: nitrogen plasma
    Weight: 10%
    Domain: Physics & Astronomy
    Semantic group: Physics
    9
    schedules
    Concept: schedules
    Weight: 9%
    Domain: Physics & Astronomy
    Semantic group: General
    8
    oxide films
    Concept: oxide films
    Weight: 8%
    Domain: Physics & Astronomy
    Semantic group: General
    8
    water vapor
    Concept: water vapor
    Weight: 8%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    6
    permittivity
    Concept: permittivity
    Weight: 6%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    6
    aluminum
    Concept: aluminum
    Weight: 6%
    Domain: Physics & Astronomy
    Semantic group: Chemistry and Materials
    5
    threshold voltage
    Concept: threshold voltage
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Physics
    5
    cycles
    Concept: cycles
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Physics
    5
    annealing
    Concept: annealing
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    5
    electrodes
    Concept: electrodes
    Weight: 5%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    4
    capacitance
    Concept: capacitance
    Weight: 4%
    Domain: Physics & Astronomy
    Semantic group: Engineering
    2
    atmospheric pressur...
    Concept: atmospheric pressure
    Weight: 2%
    Domain: Physics & Astronomy
    Semantic group: Physics

    Engineering

    General

    Chemistry and Materials

    Physics

    Selected concepts

    Engineering & Materials Science

    100
    MOS capacitors

    3 experts found with research output relating to all selected concepts

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