David McNeill

    David McNeill

    Senior Lecturer

    Phone: +44 (0)28 9097 4534

    For media contact email comms.office@qub.ac.uk
    or call +44(0)2890 973091.

    Scopus Citations 0

    1. 2018
    2. Published

      Electrical characterisation of PVD germanium resistors with rapid melt growth (RMG) process

      Zainal, N., Mitchell, S. J. N. & McNeill, D. W., 12 Nov 2018, AIP Conference Proceedings. 1 ed. AIP Publishing, Vol. 2030. 7 p. 020109. (AIP Conference Proceedings; vol. 2030).

      Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3. 2017
    4. Published

      Comparison between Scotch tape and gel-assisted mechanical exfoliation techniques for preparation of 2D transition metal dichalcogenide flakes

      Budania, P., Baine, P. T., Montgomery, J. H., McNeill, D. W., Mitchell, S. J. N., Modreanu, M. & Hurley, P. K., 01 Dec 2017, In : Micro and Nano Letters. 12, 12, p. 970-973 4 p.

      Research output: Contribution to journalArticle

    5. Published

      Medium Doped Non-Suspended Silicon Nanowire Piezoresistor using SIMOX substrate

      Tan, T. H., Mitchell, S. J. N., McNeill, D. W., Wadsworth, H., Strahan, S. & Bailie, I., 30 Mar 2017, International Conference on Advances in Electrical, Electronic and Systems Engineering (ICAEES): Proceedings. IEEE , p. 189-193 5 p.

      Research output: Chapter in Book/Report/Conference proceedingConference contribution

    6. Published

      Effect of post-exfoliation treatments on mechanically exfoliated MoS2

      Budania, P., Baine, P. T., Montgomery, J. H., McNeill, D. W., Mitchell, S. J. N., Modreanu, M. & Hurley, P. K., 22 Feb 2017, In : Materials Research Express. 4, 2, 025022., 025022

      Research output: Contribution to journalArticle

    7. Published
    8. Published

      Long-term stability of mechanically exfoliated MoS2 flakes

      Budania, P., McNeill, D., Mitchell, N., Modreanu, M. & Hurley, P., 2017.

      Research output: Contribution to conferencePaper

    9. 2016
    10. Published

      Post-exfoliation annealing and ultrasonic treatment on mechanically exfoliated MoS2

      Budania, P., Mitchell, N. & McNeill, D., Jun 2016.

      Research output: Contribution to conferencePaper

    11. Published

      Effect of Post-Exfoliation Treatments on Mechanically Exfoliated MoS2

      Budania, P., Mitchell, N. & McNeill, D., 27 May 2016.

      Research output: Contribution to conferencePaper

    12. 2015
    13. Published

      High temperature thermal stability studies of ultrathin Al2O3 layers deposited on native oxide and sulphur passivated InGaAs surfaces

      Chauhan, L., Gajula, D. R., McNeill, D. & Hughes, G., 01 Nov 2015, In : Microelectronic Engineering. 147, p. 249-253 5 p.

      Research output: Contribution to journalArticle

    14. 2014
    15. Published
    16. Published

      High temperature thermal stability of the HfO2/Ge (100) interface as a function of surface preparation studied by synchrotron radiation core level photo emission

      Chellappan, R. K., Gajula, D. R., McNeill, D. & Hughes, G., 15 Feb 2014, In : Applied Surface Science. 292, p. 345-349 5 p.

      Research output: Contribution to journalArticle

    17. Published

      Fermi level de-pinning of aluminium contacts to n-type germanium using thin atomic layer deposited layers

      Gajula, D. R., Baine, P., Modreanu, M., Hurley, P. K., Armstrong, B. M. & McNeill, D. W., 06 Jan 2014, In : Applied Physics Letters. 104, 1, 012102., 012102

      Research output: Contribution to journalArticle

    18. Published

      High-temperature stability study of 1 nm Al2O3 deposited on InAs surfaces investigated by synchrotron radiation based photoemission spectroscopy

      Chellappan, R. K., Gajula, D. R., McNeill, D. & Hughes, G., 03 Jan 2014, In : Journal of Physics D: Applied Physics. 47, 5, 055107., 055107

      Research output: Contribution to journalArticle

    19. 2013
    20. Published

      A Computational Approach for Simulating P-type Silicon Piezoresistor Using Four Point Bending Setup

      Tan, T. H., Mitchell, N., McNeill, D., Wadsworth, H. & Strahan, S., 2013. 5 p.

      Research output: Contribution to conferencePaper

    21. 2012
    22. Published

      Optimisation and scaling of interfacial GeO2 layers for high-k gate stacks on germanium and extraction of dielectric constant of GeO2

      Murad, S. N. A., Baine, P. T., McNeill, D. W., Mitchell, N., Armstrong, B. M., Modreanu, M., Hughes, G. & Chellappan, R. K., Dec 2012, In : SOLID-STATE ELECTRONICS. 78, p. 136-140 5 p.

      Research output: Contribution to journalArticle

    23. Published

      Evaluation of the piezoresistance properties of p-type silicon

      Tan, T., McNeill, D., Baine, P., Montgomery, J., Mitchell, N., Wadsworth, H., Strahan, S. & Bailie, I., 09 Sep 2012.

      Research output: Contribution to conferencePoster

    24. Published

      Investigation of crystalline quality and stress in germanium stripes fabricated by rapid melt growth process

      Perova, T. S., Zainal, N., Adley, D., Mitchell, N., McNeill, D., Bain, M., Armstrong, M. & Baine, P., Jul 2012.

      Research output: Contribution to conferencePaper

    25. Published

      Characterization of Rapid Melt Growth (RMG) Process for High Quality Thin Film Germanium on Insulator

      Zainal, N., Mitchell, N., McNeill, D., Bain, M., Armstrong, M., Baine, P., Adley, D. & Perova, T. S., Apr 2012, In : ECS Transactions. 45, p. 169-180 12 p.

      Research output: Contribution to journalArticle

    26. Published

      Electrical and Optical Characterization of GeON Layers with High-ĸ Gate Stacks on Germanium for Future MOSFETs

      Murad, S., Baine, P., Montgomery, J., McNeill, D., Mitchell, N., Armstrong, M. & Modreanu, M., Apr 2012, In : ECS Transactions. 45, 3, p. 137-144 8 p.

      Research output: Contribution to journalArticle

    27. Published

      Investigation of stress and structural damage in H and He implanted Ge using micro-Raman mapping technique on bevelled samples

      Wasyluk, J., Rainey, P. V., Perova, T. S., Mitchell, N., McNeill, D., Gamble, H., Armstrong, M. & Hurley, R., Mar 2012, In : Journal of Raman Spectroscopy. 43, 3, p. 448-454 7 p.

      Research output: Contribution to journalArticle

    28. 2011
    29. Published

      Optimisation and scaling of interfacial GeO2 layers for high-k gate stacks on germanium and extraction of dielectric constant of GeO2

      Murad, S., McNeill, D., Mitchell, N., Armstrong, M., Modreanu, M., Hughes, G. & Chellappan, R. K., Dec 2011. 2 p.

      Research output: Contribution to conferencePaper

    30. Published

      Investigation of crystalline quality and stress in Germanium-On-Insulator layers

      Litvin, A., Adley, D., Perova, T. S., Zainal, N., Mitchell, N., McNeill, D., Bain, M., Armstrong, M. & Baine, P., Aug 2011, p. 62-62. 1 p.

      Research output: Contribution to conferencePaper

    31. Published

      Investigation of germanium implanted with hydrogen for layer transfer applications

      Perova, T. S., Armstrong, M., Wasyluk, J., Baine, P., Rainey, P., Mitchell, N., McNeill, D., Gamble, H. & Hurley, R., Aug 2011, In : Solid State Phenomena. 178-179, p. 295-300 6 p.

      Research output: Contribution to journalArticle

    32. Published

      High quality thin-film Ge on insulator by Rapid Melt Growth

      Zainal, N., Mitchell, N., McNeill, D., Bain, M., Armstrong, M., Baine, P., Adley, D. & Perova, T., Jul 2011, p. 1-1. 1 p.

      Research output: Contribution to conferencePaper

    33. Published

      Characterization of Nickel Germanide Schottky Contacts for the Fabrication of Germanium p-channel MOSFETs

      Gajula, D. R., McNeill, D., Baine, P., Fleming, P., Duffy, R. & Armstrong, B. M., May 2011, In : ECS Transactions. 35, 3, p. 521-527 7 p.

      Research output: Contribution to journalArticle

    34. Published

      Germanium Processing

      Gamble, H., Armstrong, M., Baine, P., Low, Y. H., Rainey, P. V., Mitchell, N. & McNeill, D., Feb 2011, Semiconductor-On-Insulator Materials for Nanoelectronics Applications. Nazarov, C., Balestra, Raskin, Gamiz & Lysenko (eds.). Springer, p. 3-29 27 p.

      Research output: Chapter in Book/Report/Conference proceedingChapter

    35. Published

      Micro-Raman and Spreading Resistance Analysis on Beveled Implanted Germanium for Layer Transfer Applications

      Rainey, P., Wasyluk, J., Perova, T., Hurley, R., Mitchell, N., McNeill, D., Gamble, H. & Armstrong, M., Feb 2011, In : Electrochemical and Solid-State Letters. 14(2), 2, p. H69-H72 4 p.

      Research output: Contribution to journalArticle

    36. 2010
    37. Published

      (Invited) Germanium on Sapphire Technology

      Gamble, H., Baine, P. B., Low, Y. H., Rainey, P. V., Montgomery, J. H., Bain, M. F., Armstrong, B. M., McNeill, D. W. & Mitchell, N. S., Nov 2010, In : ECS Transactions. 33, 11, p. 37-50 14 p.

      Research output: Contribution to journalArticle

    38. Published

      Germanium on Sapphire Technology

      Gamble, H., Baine, P., Low, Y., Rainey, P., Montgomery, J., Armstrong, M., McNeill, D. & Mitchell, N., Nov 2010, In : ECS Transactions. 33(11), p. 37-50 14 p.

      Research output: Contribution to journalArticle

    39. Published

      Atmospheric-pressure plasma activation for low temperature bonding

      Low, Y. W., Rainey, P., Baine, P., Montgomery, J., Mitchell, N., McNeill, D., Gamble, H. & Armstrong, M., Oct 2010, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    40. Published

      Circular geometry transistors fabricated on germanium-on-alumina bonded substrates

      Baine, P., Low, Y., Rainey, P., Gamble, H., Armstrong, M., Mitchell, N. & McNeill, D., Oct 2010, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    41. Published

      Design, Manufacture and Performance of Germanium Bipolar Transistors

      Armstrong, M., Gamble, H., Armstrong, A. & McNeill, D., Oct 2010, In : ECS Transactions. 33(6), p. 181-189 9 p.

      Research output: Contribution to journalArticle

    42. Published

      Raman mapping analysis of structural damage in ion implanted bevelled Ge samples with application in smart cut technology

      Wasyluk, J., Rainey, P., Perova, T. S., Hurley, R., Mitchell, N., McNeill, D., Gamble, H. & Armstrong, M., Aug 2010, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    43. Published

      Hydrogen and helium implantation in germanium for semiconductor layer transfer applications

      Hurley, R., Rainey, P., Low, Y. W., Baine, P., McNeill, D., Mitchell, N., Gamble, H. & Armstrong, M., Jun 2010, p. 56-56. 1 p.

      Research output: Contribution to conferencePaper

    44. Published

      Surface activation treatment using atmospheric pressure plasma for low temeprature direct wafer bonding

      Low, Y. W., Gamble, H., Armstrong, M., Rainey, P., Baine, P., Montgomery, J., Mitchell, N. & McNeill, D., Jun 2010, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    45. Published

      Application of atmospheric plasma for low temperature wafer bonding

      Low, Y. W., Rainey, P., Baine, P., Montgomery, J., McNeill, D., Mitchell, N., Gamble, H. & Armstrong, M., Apr 2010, In : ECS Transactions. 28(1), p. 385-393 9 p.

      Research output: Contribution to journalArticle

    46. Published

      Carrier mobility variations in self-aligned germanium MOS transistors

      Low, Y., Tantraviwat, D., Rainey, P., Baine, P., McNeill, D., Mitchell, N., Armstrong, M. & Gamble, H., Apr 2010, In : ECS Transactions. 28(1), p. 43-49 7 p.

      Research output: Contribution to journalArticle

    47. Published

      Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI

      Armstrong, M., Baine, P., Montgomery, J., McNeill, D., Gamble, H. & Bain, M., Apr 2010, In : ECS Transactions. 28(1), p. 331-341 11 p.

      Research output: Contribution to journalArticle

    48. Published

      Hydrogen implantation in germanium

      Low, Y. W., Rainey, P., Hurley, R., Baine, P., McNeill, D., Mitchell, N., Gamble, H. & Armstrong, M., Apr 2010, In : ECS Transactions. 28(1), p. 375-383 9 p.

      Research output: Contribution to journalArticle

    49. Published

      Electrical characterization of ALD Al2O3 and HfO2 films on germanium

      Tantraviwat, D., Low, Y., Baine, P., Mitchell, N., McNeill, D., Armstrong, M. & Gamble, H., 2010, In : ECS Transactions. 28, 1, p. 201-207 7 p.

      Research output: Contribution to journalArticle

    50. 2009
    51. Published

      Carrier mobility variations in self-aligned germanium MOS transistors

      Tantraviwat, D., Rainey, P., Baine, P., McNeill, D., Mitchell, N., Armstrong, M. & Gamble, H., Dec 2009, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    52. Published

      Dopant transport in tungsten silicide layers for application in SOI technology

      Liao, S., Bain, M., Baine, P., Montgomery, J., McNeill, D., Armstrong, M. & Gamble, H., Dec 2009, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    53. Published

      Electrical characterisation of ALD Al2O3 and HfO2 films on germanium

      Tantraviwat, D., Low, Y., Baine, P., Mitchell, N., McNeill, D., Armstrong, M. & Gamble, H., Dec 2009, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    54. Published

      Electronic characterisation of Ge MOSTs measured at low temperature

      McNeill, D., Low, Y., Tantraviwat, D., Rainey, P., Baine, P., Mitchell, N., Armstrong, M. & Gamble, H., Dec 2009, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    55. Published

      Hydrogen and helium implantation in germanium for layer transfer applications

      Rainey, P., Low, Y. W., Hurley, R., Baine, P., McNeill, D., Mitchell, N., Gamble, H. & Armstrong, M., Dec 2009, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    56. Published

      The effect of atmospheric oxygen plasma on buried oxide layer for low temeprature wafer bonding

      Low, Y. W., Rainey, P., Baine, P., Montgomery, J., McNeill, D., Mitchell, N., Gamble, H. & Armstrong, M., Dec 2009, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    57. Published

      Germanium MOS transistors on sapphire and alumina platforms

      Baine, P., Gamble, H., Armstrong, M., Mitchell, N., McNeill, D., Rainey, P., Low, Y., Low, Y. W. & Tantraviwat, D., Oct 2009, p. 59-60. 2 p.

      Research output: Contribution to conferencePaper

    58. Published

      Low temperature measurement of TFTs fabricated on germanium-on-sapphire substrates

      Baine, P., Gamble, H., Armstrong, M., Mitchell, N., McNeill, D., Rainey, P., Low, Y., Low, Y. W. & Tantraviwat, D., Sep 2009, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    59. Published

      Long-Range Lateral Dopant Diffusion in Tungsten Silicide Layers

      Liao, S., Bain, M., Baine, P., McNeill, D., Armstrong, M. & Gamble, H., Feb 2009, In : IEEE Transactions on Semiconductor Manufacturing. 22, 1, p. 80-87 8 p., 4773502., 4773502

      Research output: Contribution to journalArticle

    60. Published

      Low temperature processes for manufacture of germanium MOS transistors

      Baine, P., Gamble, H., Armstrong, M., Mitchell, N., McNeill, D., Rainey, P., Low, Y., Low, Y. W. & Tantraviwat, D., Jan 2009, p. 143-144. 2 p.

      Research output: Contribution to conferencePaper

    61. Published

      Optimisation of tungsten disilicide dopant diffusion conduits for SSOI applications

      Liao, S., Bain, M., Baine, P., McNeill, D., Armstrong, M. & Gamble, H., Jan 2009, p. 83-84. 2 p.

      Research output: Contribution to conferencePaper

    62. 2008
    63. Published

      Germanium on sapphire

      Gamble, H., Baine, P., Wadsworth, H., Low, Y., Rainey, P., Ruddell, F., Armstrong, M., McNeill, D. & Mitchell, N., Dec 2008, In : International Journal of High Speed Electronics and Systems. 18, 4, p. 805-814 10 p.

      Research output: Contribution to journalArticle

    64. Published

      Germanium on Sapphire By Wafer Bonding

      Baine, P., Gamble, H., Armstrong, M., McNeill, D., Mitchell, N., Low, Y. & Rainey, P., Dec 2008, In : Solid State Electronics. 52, 12, p. 1840-1844 5 p.

      Research output: Contribution to journalArticle

    65. Published

      Germanium on sapphire substrates for system-on-a-chip

      Gamble, H., Armstrong, M., Baine, P., Low, Y., McNeill, D., Mitchell, N., Montgomery, J. & Ruddell, F., Nov 2008, In : Materials Science in Semiconductor Processing. 11(5), 5, p. 195-198 4 p.

      Research output: Contribution to journalArticle

    66. Published

      Germanium on Sapphire Substrates for System-on-a-Chip

      Armstrong, M., Gamble, H., Mitchell, N., McNeill, D., Ruddell, F., Montgomery, J., Baine, P., Low, Y. & Rainey, P., May 2008, p. 1-1. 1 p.

      Research output: Contribution to conferencePaper

    67. Published

      Conduit diffusion of dopants in tungsten silicide layers

      Armstrong, M., Gamble, H., Bain, M., Baine, P. & McNeill, D., Mar 2008, p. 65-70. 6 p.

      Research output: Contribution to conferencePaper

    68. Published

      Atomic layer deposition of hafnium oxide dielectrics on silicon and germanium substrates

      McNeill, D., Bhattacharya, S., Wadsworth, H., Ruddell, F., Mitchell, N., Armstrong, M. & Gamble, H., Feb 2008, In : Journal of Materials Science: Materials in Electronics. 19, 2, p. 119-123 5 p.

      Research output: Contribution to journalArticle

    69. Published

      Germanium on Sapphire By Wafer Bonding

      Baine, P., Gamble, H., Armstrong, M., McNeill, D. & Mitchell, N., Jan 2008.

      Research output: Contribution to conferencePaper

    70. Published

      Germanium bonding to AI2O3

      Baine, P., Gamble, H., Armstrong, M., Mitchell, N., McNeill, D., Rainey, P., Low, Y. & Bain, M., 2008, In : ECS Transactions. 16, 8, p. 407-414 8 p.

      Research output: Contribution to journalArticle

    71. 2007
    72. Published

      Effect of nitridation on Al/HfO2/Ge MIS capacitors

      Kailath, B. J., Bhattacharya, S., DasGupta, A., DasGupta, N., McNeill, D. & Gamble, H., Dec 2007, p. 194-197. 4 p.

      Research output: Contribution to conferencePaper

    73. Published

      Germanium on Sapphire

      Armstrong, M., Baine, P., Gamble, H., McNeill, D., Mitchell, N., Rainey, P., Ruddell, F. & Wadsworth, H., Dec 2007, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    74. Published

      IC SUBSTRATE AND METHOD OF MANUFACTURE

      Armstrong, M., Gamble, H., McNeill, D. & Mitchell, N., Dec 2007, Patent No. Patent Application PCT/GB2007/002281

      Research output: Patent

    75. Published

      Integration of ultrathin SOI using ion split and etch back processes

      Armstrong, M., Baine, P., Gamble, H., McNeill, D. & Suder, S., Jan 2007, p. 19-20. 2 p.

      Research output: Contribution to conferencePaper

    76. 2006
    77. Published

      Low Temperature Bonding of PECVD Silicon Dioxide Layers

      Baine, P., Bain, M., McNeill, D., Gamble, H. & Armstrong, M., Nov 2006, In : ECS Transactions. 3(6), 6, p. 165-173 9 p.

      Research output: Contribution to journalArticle

    78. Published

      Deposition and Characterization of Strained SiGe Layer as an Etch Stop Layer in Ultrathin SOI Integration

      Armstrong, M., Baine, P., Gamble, H., McNeill, D. & Suder, S., Oct 2006, p. 531-537. 7 p.

      Research output: Contribution to conferencePaper

    79. Published

      Germanium MOS Capacitors with Hafnium Dioxide and Silicon Dioxide Dielectrics

      Wadsworth, H., Bhattacharya, S., McNeill, D., Ruddell, F., Armstrong, M., Gamble, H. & Denvir, D., Aug 2006, In : Materials Science in Semiconductor Processing. 9, 4-5 SPEC. ISS., p. 685-689 5 p.

      Research output: Contribution to journalArticle

    80. Published

      Germanium MOS Capacitors with Hafnium Dioxide and Silicon Dioxide Dielectrics

      Armstrong, M., Gamble, H., McNeill, D., Ruddell, F. & Wadsworth, H., May 2006, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    81. Published

      Buried Dielectrics for GeOI

      Armstrong, M., Ruddell, F., Wadsworth, H., Gamble, H. & McNeill, D., Mar 2006, p. 43-44. 2 p.

      Research output: Contribution to conferencePaper

    82. Published

      Low temperature surface nitridation processes for dielectric-Ge interfaces

      Wadsworth, H. J., Bhattacharya, S., Ruddell, F. H., McNeill, D. W., Mitchell, N., Armstrong, B. M., Gamble, H. S. & Denvir, D., 01 Jan 2006, In : ECS Transactions. 3, 7, p. 531-537 7 p.

      Research output: Contribution to journalArticle

    83. 2005
    84. Published

      Investigation of copper layers deposited by CVD using Cu(I)hfac(TMVS) precursor

      Toh, B. H. W., McNeill, D. & Gamble, H., Jul 2005, In : Journal of Materials Science: Materials in Electronics. 16(7), 7, p. 437-443 7 p.

      Research output: Contribution to journalArticle

    85. Published

      Characterisation of copper inductors fabricated by dual damascene and electroplating techniques

      Toh, B. H. W., McNeill, D. & Gamble, H., Apr 2005, In : Journal of Materials Science: Materials in Electronics. 16(4), 4, p. 233-238 6 p.

      Research output: Contribution to journalArticle

    86. Published

      Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias

      Bain, M., Baine, P., McNeill, D., Srinivasan, G., Jankovic, N., McCartney, J., Moore, R. A., Armstrong, M. & Gamble, H., Apr 2005, p. 103-108. 6 p.

      Research output: Contribution to conferencePaper

    87. Published

      Silicon-on-insulator substrates with buried ground, planes (GPSOI)

      Bain, M., Stefanos, S., Baine, P., Loh, S. H., Jin, L., Montgomery, J., Armstrong, M., Gamble, H., Hamel, J., McNeill, D., Kraft, A. & Kemhadjian, H., Apr 2005, p. 273-278. 6 p.

      Research output: Contribution to conferencePaper

    88. Published

      Electrical Characterisation of SOI Substrates Incorporating WSix Ground Planes

      Bain, M., Jin, M., Loh, S., Armstrong, M., Gamble, H. & McNeill, D., Feb 2005, In : IEEE Electron Device Letters. 26, 2, p. 72-74 3 p.

      Research output: Contribution to journalArticle

    89. Published

      Cross-talk suppression in SOI substrates

      Armstrong, M., Bain, M., Baine, P., Gamble, H., McNeill, D. & Montgomery, J., Jan 2005, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    90. 2004
    91. Published

      Geometric linewidth and the impact of thermal processing on the stress regimes induced by electroless copper metallization for Si integrated circuit interconnect technology

      McNally, P. J., Kanatharana, J., Toh, B. H. W., McNeill, D., Danilewsky, A. N., Tuomi, T., Knuuttila, L., Riikonen, J., Toivonen, J. & Simon, R., 15 Dec 2004, In : Journal of Applied Physics. 96(12), 12, p. 7596-7602 7 p., 7., 7

      Research output: Contribution to journalArticle

    92. Published

      Tungsten Silicide Contacts to Polycrystalline Silicon and Silicon-Germanium Alloys

      Srinivasan, G., Bain, M., Bhattacharya, S., Baine, P., Armstrong, M., Gamble, H. & McNeill, D., Dec 2004, In : Materials Science and Engineering B. 114-115, SPEC. ISS., p. 223-227 5 p.

      Research output: Contribution to journalArticle

    93. Published

      Comparison of induced stresses due to electroless versus sputtered copper interconnect technology

      McNally, P. J., Kanatharana, J., Toh, B. H. W., McNeill, D., Tuomi, T., Danilewsky, A. N., Knuuttila, L., Riikonen, J. & Toivonen, J., Nov 2004, In : Semiconductor Science and Technology. 19(11), 11, p. 1280-1284 5 p.

      Research output: Contribution to journalArticle

    94. Published

      Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques

      Toh, B. H. W., Bien, D., McNeill, D. & Gamble, H., Sep 2004, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    95. Published

      Electrical characterisation of SOI substrates incorporating WSix ground planes

      Armstrong, M., Bain, M., Baine, P., Gamble, H. & McNeill, D., Apr 2004, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    96. Published

      Silicon-on-Insulator Substrates with Buried Ground Planes (GPSOI)

      Armstrong, M., Bain, M., Baine, P., Gamble, H., McNeill, D. & Montgomery, J., Apr 2004, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    97. 2003
    98. Published

      Manufacturing processes for WSi2-GPSOI substrates and their influence on cross-talk suppression and inductance

      Armstrong, M., Bain, M., Baine, P., Gamble, H. & McNeill, D., Sep 2003. 7 p.

      Research output: Contribution to conferencePaper

    99. Published

      Manufacture processes for GPSOI substrates and their influence on cross-talk suppression

      Baine, P., Gamble, H., Armstrong, M., McNeill, D., Bain, M., Hamel, J. S. & Kraft, M., Apr 2003, p. 57-63. 7 p.

      Research output: Contribution to conferencePaper

    100. Published

      Manufacturing processes for WSi2-GPSOI substrates and their influence on cross-talk suppression and inductance

      Baine, P., Gamble, H., Armstrong, M., Bain, M., McNeill, D., Hamel, J., Stefanos, S. & Kraft, M., Apr 2003.

      Research output: Contribution to conferencePaper

    101. 2001
    102. Published

      Silicon-on-insulator substrates with buried tungsten silicide layer

      Gamble, H., Armstrong, M., Baine, P., Bain, M. & McNeill, D., Oct 2001.

      Research output: Contribution to conferencePaper

    103. Published

      Effects of copper grain structure on electromigration behaviour

      Toh, B. H. W., McNeill, D. & Gamble, H., Sep 2001, p. 39-42. 4 p.

      Research output: Contribution to conferencePaper

    104. Published

      Fabrication of SOI substrates with buried tungsten silicide layer by smart-cut technique

      Suder, S., Hurley, R., Bain, M., Baine, P., McNeill, D., Armstrong, M. & Gamble, H., Sep 2001, p. 279-282. 4 p.

      Research output: Contribution to conferencePaper

    105. Published

      Surface electromigration of sputtered copper patterned using ion milling or chemical mechanical polishing

      Toh, B. W. H., McCusker, N. D., McNeill, D., Gamble, H. & Len, V. S. C., Jun 2001, In : Journal of Materials Science: Materials in Electronics. 12(4-6), 4-6, p. 307-312 6 p.

      Research output: Contribution to journalArticle

    106. Published

      Silicon-on-insulator substrates with buried tungsten silicide layer

      Gamble, H., Armstrong, M., Baine, P., Bain, M. & McNeill, D., Apr 2001, In : Solid State Electronics. 45(4), 4, p. 551-557 7 p.

      Research output: Contribution to journalArticle

    107. 2000
    108. Published

      Characterisation of copper CVD films deposited using a Cu(I)(hfac)TMVS precursor

      Toh, B. H. W., Len, V. S. C., McNeill, D. & Gamble, H., Dec 2000, p. 253-256. 4 p.

      Research output: Contribution to conferencePaper

    109. Published

      Ultra-thin BESOI fabrication techniques

      Bhattacharya, S., Suder, S., Baine, P., McNeill, D., Uppal, S., Armstrong, A., Armstrong, M. & Gamble, H., Dec 2000, p. 227-230. 4 p.

      Research output: Contribution to conferencePaper

    110. Published

      Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide

      Bera, L. K., Choi, W. K., McNeill, D., Ray, S. K., Chatterjee, S. & Maiti, C. K., Nov 2000, p. H5.14.1-H5.14.6. 6 p.

      Research output: Contribution to conferencePaper

    111. Published

      A comparative study into surface electromigration of sputtered copper patterned using lift-off and CMP

      McCusker, N. D., Len, V. S. C., Toh, B. H. W., McNeill, D. & Gamble, H., Oct 2000, p. 93-96. 4 p.

      Research output: Contribution to conferencePaper

    112. Published

      Characterisation of copper CVD films deposited using copper (I) hexafluoroacetylacetonate trimethylvinylsilane - effects of water vapour and post annealing

      Len, V. S. C., Toh, B. H. W., McNeill, D. & Gamble, H., Oct 2000, p. 243-246. 4 p.

      Research output: Contribution to conferencePaper

    113. Published

      An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP

      Len, V. S. C., McNeill, D. & Gamble, H., Apr 2000, p. E7.4.1-E7.4.6. 6 p.

      Research output: Contribution to conferencePaper

    114. 1999
    115. Published

      Application of surface plasmon polaritons in the laser ablation and characterisation of thin aluminium films

      Cairns, GF., McNeill, DA. & Dawson, P., 10 Jun 1999, In : Surface Science. 429, 1-3, p. 117-126 10 p.

      Research output: Contribution to journalArticle

    116. Published

      An investigation into the performance of diffusion barrier materials against copper diffusion using metal-oxide-semiconductor (MOS) capacitor structures

      Len, V. S. C., Hurley, R., McCusker, N., McNeill, D., Armstrong, M. & Gamble, H., Jun 1999, In : Solid State Electronics. 43(6), p. 1045-1049 5 p.

      Research output: Contribution to journalArticle

    117. Published

      Characterisation of SOI thin film transistors fabricated using SiGe etch stop layers

      Uppal, S., Gay, D. L., Armstrong, A., McNeill, D., Baine, P., Armstrong, M., Gamble, H. & Yallup, K., May 1999, p. 219-224. 6 p.

      Research output: Contribution to conferencePaper

    118. Published

      Investigation of p-type contamination in thin SOI layers during fabrication

      Uppal, S., Gay, D. L., Armstrong, A., McNeill, D., Baine, P., Armstrong, M., Gamble, H. & Yallop, K., Apr 1999, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    119. 1998
    120. Published

      Electromigration in copper interconnects

      McCusker, N., Len, V. S. C., McNeill, D., Armstrong, M. & Gamble, H., Jun 1998, p. 0-0. 1 p.

      Research output: Contribution to conferencePaper

    Previous 1 2 Next