An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP

    Research output: Contribution to conferencePaper

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    Original languageEnglish
    PagesE7.4.1-E7.4.6
    Number of pages6
    Publication statusPublished - Apr 2000
    EventMRS Symposium Proceedings - San Francisco, United States
    Duration: 01 Apr 200001 Apr 2000

    Conference

    ConferenceMRS Symposium Proceedings
    CountryUnited States
    CitySan Francisco
    Period01/04/200001/04/2000

    ID: 726217