Electrical characterisation of ALD Al2O3 and HfO2 films on germanium

    Research output: Contribution to conferencePaper

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    Original languageEnglish
    Pages0-0
    Number of pages1
    Publication statusPublished - Dec 2009
    EventMaterials Ireland Conference - Cork, Ireland
    Duration: 01 Dec 200901 Dec 2009

    Conference

    ConferenceMaterials Ireland Conference
    CountryIreland
    CityCork
    Period01/12/200901/12/2009

    ID: 733837