Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias

    Research output: Contribution to conferencePaper

    Published

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    Original languageEnglish
    Pages103-108
    Number of pages6
    Publication statusPublished - Apr 2005
    EventNATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment - Kyiv, Ukraine
    Duration: 01 Apr 200401 Apr 2004

    Conference

    ConferenceNATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment
    CountryUkraine
    CityKyiv
    Period01/04/200401/04/2004

    ID: 387838