Hydrogen and helium implantation in germanium for semiconductor layer transfer applications

    Research output: Contribution to conferencePaper

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    Original languageEnglish
    Pages56-56
    Number of pages1
    Publication statusPublished - Jun 2010
    EventVIII-th INTERNATIONAL CONFERENCE on ION IMPLANTATION AND OTHER APPLICATIONS OF IONS AND ELECTRONS - Kazimierz Dolny, Poland
    Duration: 01 Jun 201001 Jun 2010

    Conference

    ConferenceVIII-th INTERNATIONAL CONFERENCE on ION IMPLANTATION AND OTHER APPLICATIONS OF IONS AND ELECTRONS
    CountryPoland
    CityKazimierz Dolny
    Period01/06/201001/06/2010

    ID: 872743