Investigation of p-type contamination in thin SOI layers during fabrication

    Research output: Contribution to conferencePaper

    Published

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    Original languageEnglish
    Pages0-0
    Number of pages1
    Publication statusPublished - Apr 1999
    EventMRS '99 Spring Meeting - San Francisco, United States
    Duration: 01 Apr 199901 Apr 1999

    Conference

    ConferenceMRS '99 Spring Meeting
    CountryUnited States
    CitySan Francisco
    Period01/04/199901/04/1999

    ID: 734123