Low Temperature Bonding of PECVD Silicon Dioxide Layers

    Research output: Contribution to journalArticle

    Published

    View graph of relations

    Original languageEnglish
    Number of pages9
    Pages (from-to)165-173
    JournalECS Transactions
    Journal publication dateNov 2006
    Issue number6
    Volume3(6)
    Publication statusPublished - Nov 2006
    Event210th Electrochemical Society Meeting, Semiconductor Wafer Bonding : Science, Technology and Application - Cancun, Mexico
    Duration: 01 Nov 200601 Nov 2006

    ID: 49740809