Low temperature processes for manufacture of germanium MOS transistors

    Research output: Contribution to conferencePaper

    Published

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    Original languageEnglish
    Pages143-144
    Number of pages2
    Publication statusPublished - Jan 2009
    EventProceedings of EuroSOI 2009 - Goteborg, Sweden
    Duration: 01 Jan 200901 Jan 2009

    Conference

    ConferenceProceedings of EuroSOI 2009
    CountrySweden
    CityGoteborg
    Period01/01/200901/01/2009

    ID: 725928