Manufacture processes for GPSOI substrates and their influence on cross-talk suppression

    Research output: Contribution to conferencePaper

    Published

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    Original languageEnglish
    Pages57-63
    Number of pages7
    Publication statusPublished - Apr 2003
    EventElectrochemical Society Proc, Semiconductor Wafer Bonding VII, Science Technology and Applications - Proc of the Intl Symposium - Paris, France
    Duration: 01 Apr 200301 Apr 2003

    Conference

    ConferenceElectrochemical Society Proc, Semiconductor Wafer Bonding VII, Science Technology and Applications - Proc of the Intl Symposium
    CountryFrance
    CityParis
    Period01/04/200301/04/2003

    ID: 387864