Silicon-on-Insulator Substrates with Buried Ground Planes (GPSOI)

    Research output: Contribution to conferencePaper

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    Original languageEnglish
    Pages0-0
    Number of pages1
    Publication statusPublished - Apr 2004
    EventNATO Advanced Research Workshop: Science & Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment - Kiev, Ukraine
    Duration: 01 Apr 200401 Apr 2004

    Conference

    ConferenceNATO Advanced Research Workshop: Science & Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment
    CountryUkraine
    CityKiev
    Period01/04/200401/04/2004

    ID: 536483