Silicon-on-insulator substrates with buried tungsten silicide layer

    Research output: Contribution to conferencePaper

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    Original languageEnglish
    Publication statusPublished - Oct 2001
    EventEuropean Meeting on Silicon-on-Insulator Devices (EUROSOI-2000) - Granada, Spain
    Duration: 01 Oct 200101 Oct 2001

    Conference

    ConferenceEuropean Meeting on Silicon-on-Insulator Devices (EUROSOI-2000)
    CountrySpain
    CityGranada
    Period01/10/200101/10/2001

    ID: 607513