Structural and electrical characterizations of oxynitride films on solid phase epitaxially grown silicon carbide

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    Original languageEnglish
    PagesH5.14.1-H5.14.6
    Number of pages6
    Publication statusPublished - Nov 2000
    EventMRS Symposium Proceedings - San Francisco, United States
    Duration: 01 Apr 200001 Apr 2000

    Conference

    ConferenceMRS Symposium Proceedings
    CountryUnited States
    CitySan Francisco
    Period01/04/200001/04/2000

    ID: 727011